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SCANNING ION MICROSCOPY AND MICROSECTIONING OF ELECTRON-BEAM RECRYSTALLIZED SILICON ON INSULATOR DEVICES

KIRK, ECG and MCMAHON, RA and CLEAVER, JRA and AHMED, H (1988) SCANNING ION MICROSCOPY AND MICROSECTIONING OF ELECTRON-BEAM RECRYSTALLIZED SILICON ON INSULATOR DEVICES. J VAC SCI TECHNOL B, 6. pp. 1940-1943. ISSN 1071-1023

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 09 Dec 2016 17:50
Last Modified: 10 Dec 2016 22:04
DOI: