CUED Publications database

Electrostatically Transduced Face-Shear Mode Silicon MEMS Microresonator

Lin, ATH and Yan, JZ and Seshia, AA (2010) Electrostatically Transduced Face-Shear Mode Silicon MEMS Microresonator. In: UNSPECIFIED pp. 534-538..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Div D > Geotechnical and Environmental
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:52
Last Modified: 30 Nov 2014 21:46
DOI: