CUED Publications database

Electrostatically Transduced Face-Shear Mode Silicon MEMS Microresonator

Lin, ATH and Yan, JZ and Seshia, AA (2010) Electrostatically Transduced Face-Shear Mode Silicon MEMS Microresonator. In: UNSPECIFIED pp. 534-538..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Div D > Geotechnical and Environmental
Depositing User: Cron Job
Date Deposited: 09 Dec 2016 17:20
Last Modified: 16 Jan 2017 10:04
DOI: