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CHARACTERIZATION OF THE DUAL E-BEAM TECHNIQUE FOR RECRYSTALLIZING POLYSILICON FILMS

DAVIS, JR and MCMAHON, RA and AHMED, H (1985) CHARACTERIZATION OF THE DUAL E-BEAM TECHNIQUE FOR RECRYSTALLIZING POLYSILICON FILMS. J ELECTROCHEM SOC, 132. pp. 1919-1924. ISSN 0013-4651

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 18 May 2016 18:14
Last Modified: 25 Aug 2016 05:03
DOI: