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CHARACTERIZATION OF THE DUAL E-BEAM TECHNIQUE FOR RECRYSTALLIZING POLYSILICON FILMS

DAVIS, JR and MCMAHON, RA and AHMED, H (1985) CHARACTERIZATION OF THE DUAL E-BEAM TECHNIQUE FOR RECRYSTALLIZING POLYSILICON FILMS. J ELECTROCHEM SOC, 132. pp. 1919-1924. ISSN 0013-4651

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Item Type: Article
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Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:29
Last Modified: 12 Mar 2015 01:22
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