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ELECTRON-BEAM SYSTEM FOR RAPID ISOTHERMAL ANNEALING OF SEMICONDUCTOR-MATERIALS AND DEVICES

MCMAHON, RA and HASKO, DG and AHMED, H (1985) ELECTRON-BEAM SYSTEM FOR RAPID ISOTHERMAL ANNEALING OF SEMICONDUCTOR-MATERIALS AND DEVICES. REV SCI INSTRUM, 56. pp. 1257-1261. ISSN 0034-6748

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Item Type: Article
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Depositing User: Cron job
Date Deposited: 16 Jul 2015 13:25
Last Modified: 05 Sep 2015 01:54
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