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ELECTRON-BEAM SYSTEM FOR RAPID ISOTHERMAL ANNEALING OF SEMICONDUCTOR-MATERIALS AND DEVICES

MCMAHON, RA and HASKO, DG and AHMED, H (1985) ELECTRON-BEAM SYSTEM FOR RAPID ISOTHERMAL ANNEALING OF SEMICONDUCTOR-MATERIALS AND DEVICES. REV SCI INSTRUM, 56. pp. 1257-1261. ISSN 0034-6748

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 15 Dec 2015 12:48
Last Modified: 28 Apr 2016 22:35
DOI: