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CROSS-SECTIONAL TEM AND SEM STUDIES OF SILICON ON INSULATOR REGROWTH MECHANISMS

WILLIAMS, DA and MCMAHON, RA and AHMED, H and STOBBS, WM (1987) CROSS-SECTIONAL TEM AND SEM STUDIES OF SILICON ON INSULATOR REGROWTH MECHANISMS. INST PHYS CONF SER. pp. 415-420. ISSN 0951-3248

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 02 Sep 2016 16:43
Last Modified: 27 Sep 2016 22:35
DOI: