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CROSS-SECTIONAL TEM AND SEM STUDIES OF SILICON ON INSULATOR REGROWTH MECHANISMS

WILLIAMS, DA and MCMAHON, RA and AHMED, H and STOBBS, WM (1987) CROSS-SECTIONAL TEM AND SEM STUDIES OF SILICON ON INSULATOR REGROWTH MECHANISMS. INST PHYS CONF SER. pp. 415-420. ISSN 0951-3248

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:52
Last Modified: 10 Mar 2014 18:02
DOI: