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SCANNING ELECTRON-MICROSCOPY STUDY OF SEEDED RECRYSTALLIZATION OF SILICON-ON-INSULATOR LAYERS WITH EITHER POLYCRYSTALLINE OR EPITAXIALLY DEPOSITED SILICON IN THE SEED WINDOWS

SMITH, DA and MCMAHON, RA and AHMED, H and BARFOOT, KM and PETERS, TB and HOPPER, GF and GODFREY, DJ (1988) SCANNING ELECTRON-MICROSCOPY STUDY OF SEEDED RECRYSTALLIZATION OF SILICON-ON-INSULATOR LAYERS WITH EITHER POLYCRYSTALLINE OR EPITAXIALLY DEPOSITED SILICON IN THE SEED WINDOWS. J APPL PHYS, 63. pp. 1438-1441. ISSN 0021-8979

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Item Type: Article
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Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:18
Last Modified: 01 May 2015 19:06
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