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SCANNING ELECTRON-MICROSCOPY STUDY OF SEEDED RECRYSTALLIZATION OF SILICON-ON-INSULATOR LAYERS WITH EITHER POLYCRYSTALLINE OR EPITAXIALLY DEPOSITED SILICON IN THE SEED WINDOWS

SMITH, DA and MCMAHON, RA and AHMED, H and BARFOOT, KM and PETERS, TB and HOPPER, GF and GODFREY, DJ (1988) SCANNING ELECTRON-MICROSCOPY STUDY OF SEEDED RECRYSTALLIZATION OF SILICON-ON-INSULATOR LAYERS WITH EITHER POLYCRYSTALLINE OR EPITAXIALLY DEPOSITED SILICON IN THE SEED WINDOWS. J APPL PHYS, 63. pp. 1438-1441. ISSN 0021-8979

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Item Type: Article
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Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 16 Jul 2015 13:43
Last Modified: 28 Aug 2015 22:17
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