CUED Publications database

CLEANING PROCEDURES FOR UHV CLUSTER-TOOL MOS FABRICATION

SOFIELD, CJ and MURRELL, MP and SUGDEN, S and HEYNS, M and VERHAVERBEKE, S and WELLAND, ME and GOLAN, B and BARNES, J (1992) CLEANING PROCEDURES FOR UHV CLUSTER-TOOL MOS FABRICATION. In: UNSPECIFIED pp. 105-111..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 02 Sep 2016 16:27
Last Modified: 01 Dec 2016 08:33
DOI: