CUED Publications database

Creation and properties of nitrogen dangling bond defects in silicon nitride thin films

Warren, WL and Seager, CH and Robertson, J and Kanicki, J and Poindexter, EH (1996) Creation and properties of nitrogen dangling bond defects in silicon nitride thin films. J ELECTROCHEM SOC, 143. pp. 3685-3691. ISSN 0013-4651

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Item Type: Article
Uncontrolled Keywords: HYDROGENATED AMORPHOUS-SILICON INDUCED PARAMAGNETIC DEFECTS ELECTRON-SPIN-RESONANCE SI-N FILMS SLOW PROCESSES MODEL CENTERS ENERGY
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:25
Last Modified: 05 Feb 2015 00:35
DOI: