CUED Publications database

Creation and properties of nitrogen dangling bond defects in silicon nitride thin films

Warren, WL and Seager, CH and Robertson, J and Kanicki, J and Poindexter, EH (1996) Creation and properties of nitrogen dangling bond defects in silicon nitride thin films. J ELECTROCHEM SOC, 143. pp. 3685-3691. ISSN 0013-4651

Full text not available from this repository.
Item Type: Article
Uncontrolled Keywords: HYDROGENATED AMORPHOUS-SILICON INDUCED PARAMAGNETIC DEFECTS ELECTRON-SPIN-RESONANCE SI-N FILMS SLOW PROCESSES MODEL CENTERS ENERGY
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 15 Dec 2015 13:19
Last Modified: 30 Apr 2016 04:11
DOI: