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Microwave power dependence of the optical and structural properties of boron and phosphorus-doped SiC : H films prepared using ECR-CVD

Yoon, SF and Ji, R and Ahn, J and Milne, WI (1997) Microwave power dependence of the optical and structural properties of boron and phosphorus-doped SiC : H films prepared using ECR-CVD. OPT MATER, 8. pp. 287-293. ISSN 0925-3467

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Item Type: Article
Uncontrolled Keywords: AMORPHOUS-SILICON CARBIDE METHANE GAP
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:29
Last Modified: 01 May 2015 18:53
DOI: