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Influence of nitrogen and temperature on the deposition of tetrahedrally bonded amorphous carbon

Kleinsorge, B and Ferrari, AC and Robertson, J and Milne, WI (2000) Influence of nitrogen and temperature on the deposition of tetrahedrally bonded amorphous carbon. J APPL PHYS, 88. pp. 1149-1157. ISSN 0021-8979

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Item Type: Article
Uncontrolled Keywords: FILTERED CATHODIC VACUUM ION ENERGY-DISTRIBUTIONS DIAMOND-LIKE CARBON ELECTRONIC-PROPERTIES THIN-FILMS OPTICAL-EMISSION LASER GROWTH HARD TRANSPORT
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:44
Last Modified: 30 Jun 2014 01:09
DOI:

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