CUED Publications database

Influence of nitrogen and temperature on the deposition of tetrahedrally bonded amorphous carbon

Kleinsorge, B and Ferrari, AC and Robertson, J and Milne, WI (2000) Influence of nitrogen and temperature on the deposition of tetrahedrally bonded amorphous carbon. J APPL PHYS, 88. pp. 1149-1157. ISSN 0021-8979

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Item Type: Article
Uncontrolled Keywords: FILTERED CATHODIC VACUUM ION ENERGY-DISTRIBUTIONS DIAMOND-LIKE CARBON ELECTRONIC-PROPERTIES THIN-FILMS OPTICAL-EMISSION LASER GROWTH HARD TRANSPORT
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 16 Jul 2015 13:05
Last Modified: 02 Aug 2015 00:51
DOI: