CUED Publications database

Nanopatterning of spin-coatable TiO2 resist using an electron beam

Saifullah, MSM and Welland, ME (2003) Nanopatterning of spin-coatable TiO2 resist using an electron beam. In: UNSPECIFIED pp. 513-523..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: electron beam nanolithography inorganic resists titania titanium dioxide chelating agents metal alkoxides AL2O3 GEL FILMS THIN-FILMS PHOTOLYSIS NANOLITHOGRAPHY LITHOGRAPHY HYDROLYSIS ALKOXIDE GRATINGS BUTOXIDE
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:49
Last Modified: 17 Mar 2014 14:50
DOI:

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