Saifullah, MSM and Welland, ME (2003) Nanopatterning of spin-coatable TiO2 resist using an electron beam. In: UNSPECIFIED pp. 513-523..
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| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
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| Uncontrolled Keywords: | electron beam nanolithography inorganic resists titania titanium dioxide chelating agents metal alkoxides AL2O3 GEL FILMS THIN-FILMS PHOTOLYSIS NANOLITHOGRAPHY LITHOGRAPHY HYDROLYSIS ALKOXIDE GRATINGS BUTOXIDE |
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| Subjects: | UNSPECIFIED |
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| Divisions: | UNSPECIFIED |
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| Depositing User: | Cron Job |
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| Date Deposited: | 04 Nov 2011 15:51 |
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| Last Modified: | 20 May 2013 01:34 |
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| DOI: | |
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