CUED Publications database

TiNi shape memory alloy based micropumps

Fu, YQ and Luo, JK and Hu, M and Du, HJ and Flewitt, AJ and Milne, WI (2005) TiNi shape memory alloy based micropumps. In: UNSPECIFIED pp. 399-406..

Full text not available from this repository.
Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: TiNi film shape memory sputtering MEMS micropump THIN-FILMS MEMS APPLICATIONS FABRICATION SILICON
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 02 Sep 2016 17:49
Last Modified: 07 Dec 2016 02:08
DOI: