CUED Publications database

TiNi shape memory alloy based micropumps

Fu, YQ and Luo, JK and Hu, M and Du, HJ and Flewitt, AJ and Milne, WI (2005) TiNi shape memory alloy based micropumps. In: UNSPECIFIED pp. 399-406..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: TiNi film shape memory sputtering MEMS micropump THIN-FILMS MEMS APPLICATIONS FABRICATION SILICON
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 18 May 2016 19:08
Last Modified: 28 May 2016 00:35
DOI: 10.1117/12.608506