CUED Publications database

TiNi shape memory alloy based micropumps

Fu, YQ and Luo, JK and Hu, M and Du, HJ and Flewitt, AJ and Milne, WI (2005) TiNi shape memory alloy based micropumps. In: UNSPECIFIED pp. 399-406..

Full text not available from this repository.
Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: TiNi film shape memory sputtering MEMS micropump THIN-FILMS MEMS APPLICATIONS FABRICATION SILICON
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 15 Dec 2015 12:45
Last Modified: 10 Feb 2016 22:21
DOI: 10.1117/12.608506