Fu, YQ and Luo, JK and Hu, M and Du, HJ and Flewitt, AJ and Milne, WI (2005) TiNi shape memory alloy based micropumps. In: UNSPECIFIED pp. 399-406..
Full text not available from this repository.
| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
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| Uncontrolled Keywords: | TiNi film shape memory sputtering MEMS micropump THIN-FILMS MEMS APPLICATIONS FABRICATION SILICON |
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| Subjects: | UNSPECIFIED |
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| Divisions: | UNSPECIFIED |
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| Depositing User: | Cron Job |
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| Date Deposited: | 20 Dec 2011 12:10 |
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| Last Modified: | 20 May 2013 01:38 |
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| DOI: | 10.1117/12.608506 |
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