CUED Publications database

New resists for proton beam writing

van Kan, JA and Bettiol, AA and Chiam, SY and Saifullah, MSM and Subramanian, KRV and Welland, ME and Watt, F (2007) New resists for proton beam writing. In: UNSPECIFIED pp. 460-463..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: proton beam writing direct write high aspect ratio resist OPTICAL WAVE-GUIDES COMPOSITE-MATERIALS LITHOGRAPHY TITANIA FILMS CR-39 PMMA
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:43
Last Modified: 17 Mar 2014 14:50
DOI: 10.1016/j.nimb.2007.02.063

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