Hopper, RH and Haneef, I and Ali, SZ and Udrea, F and Oxley, CH (2010) Use of carbon micro-particles for improved infrared temperature measurement of CMOS MEMS devices. MEAS SCI TECHNOL, 21. -. ISSN 0957-0233
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| Item Type: | Article |
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| Uncontrolled Keywords: | temperature measurement infrared thermal microscopy (IR) carbon micro-particle micro-electro-mechanical systems (MEMS) complementary metal oxide semiconductor (CMOS) thermal flow sensor MICRO HOTPLATE SENSOR |
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| Subjects: | UNSPECIFIED |
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| Divisions: | Div B > Electronics, Power & Energy Conversion |
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| Depositing User: | Cron Job |
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| Date Deposited: | 28 Oct 2011 16:36 |
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| Last Modified: | 20 May 2013 01:42 |
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| DOI: | 10.1088/0957-0233/21/4/045107 |
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