Hopper, RH and Haneef, I and Ali, SZ and Udrea, F and Oxley, CH (2010) Use of carbon micro-particles for improved infrared temperature measurement of CMOS MEMS devices. MEAS SCI TECHNOL, 21. -. ISSN 0957-0233
Full text not available from this repository.| Item Type: | Article |
|---|---|
| Uncontrolled Keywords: | temperature measurement infrared thermal microscopy (IR) carbon micro-particle micro-electro-mechanical systems (MEMS) complementary metal oxide semiconductor (CMOS) thermal flow sensor MICRO HOTPLATE SENSOR |
| Subjects: | UNSPECIFIED |
| Divisions: | UNSPECIFIED |
| Depositing User: | Cron job |
| Date Deposited: | 04 Feb 2015 22:31 |
| Last Modified: | 05 Feb 2015 00:42 |
| DOI: | 10.1088/0957-0233/21/4/045107 |
