Hopper, RH and Haneef, I and Ali, SZ and Udrea, F and Oxley, CH (2010) Use of carbon micro-particles for improved infrared temperature measurement of CMOS MEMS devices. MEAS SCI TECHNOL, 21. -. ISSN 0957-0233
Full text not available from this repository.Item Type: | Article |
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Uncontrolled Keywords: | temperature measurement infrared thermal microscopy (IR) carbon micro-particle micro-electro-mechanical systems (MEMS) complementary metal oxide semiconductor (CMOS) thermal flow sensor MICRO HOTPLATE SENSOR |
Subjects: | UNSPECIFIED |
Divisions: | Div B > Electronics, Power & Energy Conversion |
Depositing User: | Cron Job |
Date Deposited: | 17 Jul 2017 19:18 |
Last Modified: | 13 Apr 2021 09:54 |
DOI: | 10.1088/0957-0233/21/4/045107 |