CUED Publications database

Use of carbon micro-particles for improved infrared temperature measurement of CMOS MEMS devices

Hopper, RH and Haneef, I and Ali, SZ and Udrea, F and Oxley, CH (2010) Use of carbon micro-particles for improved infrared temperature measurement of CMOS MEMS devices. MEAS SCI TECHNOL, 21. -. ISSN 0957-0233

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Item Type: Article
Uncontrolled Keywords: temperature measurement infrared thermal microscopy (IR) carbon micro-particle micro-electro-mechanical systems (MEMS) complementary metal oxide semiconductor (CMOS) thermal flow sensor MICRO HOTPLATE SENSOR
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:31
Last Modified: 05 Feb 2015 00:42
DOI: 10.1088/0957-0233/21/4/045107