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Effect of deposition conditions on the chemical bonding in sputtered carbon nitride films

Axén, N and Botton, GA and Somekh, RE and Hutchings, IM (1996) Effect of deposition conditions on the chemical bonding in sputtered carbon nitride films. Diamond and Related Materials, 5. pp. 163-168. ISSN 0925-9635

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:09
Last Modified: 27 Jul 2017 05:57
DOI: