CUED Publications database

On-line topographic analysis in the SEM

Holburn, DM and Smith, KCA (1979) On-line topographic analysis in the SEM. Scanning Electron Microscopy, VOL. 2. pp. 47-52. ISSN 0586-5581

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Abstract

A novel method for on-line topographic analysis of rough surfaces in the SEM has been investigated. It utilizes a digital minicomputer configured to act as a programmable scan generator and automatic focusing unit. A further digital-to-analog converter regulates the current supply to the objective lens of the microscope. The video signal is sampled by means of an analog-to-digital converter and the resultant binary code stored in the computer's memory as an array of numbers describing relative image intensity. The sensitivity of the method for detecting small height changes is theroretically of the order of 1 mu m.

Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:53
Last Modified: 22 May 2018 07:49
DOI: