Tee, WJ and Smith, KCA and Holburn, DM (1979) An automatic focusing and stigmating system for the SEM. Journal of Physics E: Scientific Instruments, 12. pp. 35-38. ISSN 0022-3735Full text not available from this repository.
A digital minicomputer has been interfaced with a scanning electron microscope, and programmed to control the excitations of the objective lens and the stigmator of the microscope. The electron beam is scanned by a digital scan generator and the digitised video signal is used for computations. To focus the microscope, a parameter related to the 'sharpness' of the image is maximised, and to set the stigmator, the directional information in the above- and below-focus images is used.
|Divisions:||Div B > Solid State Electronics and Nanoscale Science|
|Depositing User:||Cron Job|
|Date Deposited:||02 Sep 2016 17:09|
|Last Modified:||08 Dec 2016 03:27|