CUED Publications database

An automatic focusing and stigmating system for the SEM

Tee, WJ and Smith, KCA and Holburn, DM (1979) An automatic focusing and stigmating system for the SEM. Journal of Physics E: Scientific Instruments, 12. pp. 35-38. ISSN 0022-3735

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Abstract

A digital minicomputer has been interfaced with a scanning electron microscope, and programmed to control the excitations of the objective lens and the stigmator of the microscope. The electron beam is scanned by a digital scan generator and the digitised video signal is used for computations. To focus the microscope, a parameter related to the 'sharpness' of the image is maximised, and to set the stigmator, the directional information in the above- and below-focus images is used.

Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:39
Last Modified: 27 Nov 2014 19:24
DOI: