CUED Publications database

An automatic focusing and stigmating system for the SEM

Tee, WJ and Smith, KCA and Holburn, DM (1979) An automatic focusing and stigmating system for the SEM. Journal of Physics E: Scientific Instruments, 12. pp. 35-38. ISSN 0022-3735

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:39
Last Modified: 17 Mar 2014 15:00
DOI: