CUED Publications database

An automatic focusing and stigmating system for the SEM

Tee, WJ and Smith, KCA and Holburn, DM (1979) An automatic focusing and stigmating system for the SEM. Journal of Physics E: Scientific Instruments, 12. pp. 35-38. ISSN 0022-3735

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Abstract

A digital minicomputer has been interfaced with a scanning electron microscope, and programmed to control the excitations of the objective lens and the stigmator of the microscope. The electron beam is scanned by a digital scan generator and the digitised video signal is used for computations. To focus the microscope, a parameter related to the 'sharpness' of the image is maximised, and to set the stigmator, the directional information in the above- and below-focus images is used. | A digital minicomputer has been interfaced with a scanning electron microscope, and programmed to control the excitations of the objective lens and the stigmator of the microscope. The electron beam is scanned by a digital scan generator and the digitized video signal is used for computations. To focus the microscope, a parameter related to the 'sharpness' of the image is maximized, and to set the stigmator, the directional information in the above and below-focus images is used.

Item Type: Article
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 16 Jul 2015 13:40
Last Modified: 30 Jul 2015 03:25
DOI: