CUED Publications database

ON-LINE STEREO PROCESSING FOR THE SEM.

Holburn, DM and Smith, KCA (1977) ON-LINE STEREO PROCESSING FOR THE SEM. Inst Phys Conf Ser. pp. 99-102.

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Abstract

A convenient system for the rapid extraction of three dimensional information from pairs of SEM images has been constructed, eliminating the need for time-consuming photography. Results are produced in a digestable form. Distortions inherent in the SEM record display and in the photographic system are not relevant to the system described; only those arising within the column and stage need be considered.

Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:39
Last Modified: 27 Nov 2014 19:24
DOI: