CUED Publications database

Topographical analysis in the SEM using an automatic focusing technique

Holburn, DM and Smith, KCA (1982) Topographical analysis in the SEM using an automatic focusing technique. Journal of Microscopy, 127. pp. 93-103. ISSN 0022-2720

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:53
Last Modified: 25 Jul 2017 05:41
DOI: