CUED Publications database

Application of electron beams in thermal processing of semiconductor materials and devices

McMahon, RA and Ahmed, H and Godfrey, DJ and Pitt, MG (1984) Application of electron beams in thermal processing of semiconductor materials and devices. Microelectronics Journal, 15. pp. 5-23. ISSN 0026-2692

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:31
Last Modified: 10 Mar 2014 18:02
DOI: