McMahon, RA and Hasko, DG and Ahmed, H and Stobbs, WM and Godfrey, DJ (1985) COMPARISON OF MILLISECOND ANNEALING OF B IMPLANTS AND ISOTHERMAL ANNEALING FOR TIMES OF A FEW SECONDS. Materials Research Society Symposia Proceedings, 35. pp. 347-352. ISSN 0272-9172Full text not available from this repository.
The annealing behaviour of B implants in the millisecond time regime using a combination of swept line beam and background heating is compared with isothermal annealing with heating cycles of a few seconds. Carrier concentration profiles show that under annealing conditions which restrict diffusion, millisecond processing gives higher activation of B implants than isothermal heating. Transmission electron microscopy shows that millisecond annealing also results in a lower defect density.
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