CUED Publications database

Formation of silicon-on-insulator layers by electron beam recrystallization

McMahon, RA (1988) Formation of silicon-on-insulator layers by electron beam recrystallization. Microelectronic Engineering, 8. pp. 255-272. ISSN 0167-9317

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:31
Last Modified: 10 Mar 2014 18:02
DOI: