CUED Publications database

Nanostructuring of materials for device and sensor applications

Oda, S and Moore, DF and Milne, WI (1999) Nanostructuring of materials for device and sensor applications. Engineering Science and Education Journal, 8. pp. 281-285. ISSN 0963-7346

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Abstract

The recent developments in nanotechnology are reviewed, with particular emphasis on its application in microsystem technology where increased reliability is achieved by integrating the sensor and the readout electronics on the same substrate. New applications may be possible using integrated micromechanical clips to connect optic fibers and components in integrated silicon systems. Some of the key developments in enabling technologies are also described, including the control of thin film deposition, nanostructuring to tailor the properties of thin film, silicon micromachining to make sensors, and microclips for the low-cost assembly of integrated optical microsystems.

Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:11
Last Modified: 27 Nov 2014 19:23
DOI: