CUED Publications database

Density, sp3 content and internal layering of DLC films by X-ray reflectivity and electron energy loss spectroscopy

LiBassi, A and Ferrari, AC and Stolojan, V and Tanner, BK and Robertson, J and Brown, LM (2000) Density, sp3 content and internal layering of DLC films by X-ray reflectivity and electron energy loss spectroscopy. Diamond and Related Materials, 9. pp. 771-776. ISSN 0925-9635

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Abstract

A variety of hydrogenated and non-hydrogenated amorphous carbon thin films have been characterized by means of grazing-incidence X-ray reflectivity (XRR) to give information about their density, thickness, surface roughness and layering. We used XRR to validate the density of ta-C, ta-C:H and a-C:H films derived from the valence plasmon in electron energy loss spectroscopy measurements, up to 3.26 and 2.39 g/cm3 for ta-C and ta-C:H, respectively. By comparing XRR and electron energy loss spectroscopy (EELS) data, we have been able for the first time to fit a common electron effective mass of m*/me = 0.87 for all amorphous carbons and diamond, validating the `quasi-free' electron approach to density from valence plasmon energy. While hydrogenated films are found to be substantially uniform in density across the film, ta-C films grown by the filtered cathodic vacuum arc (FCVA) show a multilayer structure. However, ta-C films grown with an S-bend filter show a high uniformity and only a slight dependence on the substrate bias of both sp3 and layering.

Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:21
Last Modified: 08 Dec 2014 02:25
DOI: 10.1016/S0925-9635(99)00233-2