CUED Publications database

Preparation of tetrahedral amorphous carbon films by filtered cathodic vacuum arc deposition

Polo, MC and Andújar, JL and Hart, A and Robertson, J and Milne, WI (2000) Preparation of tetrahedral amorphous carbon films by filtered cathodic vacuum arc deposition. Diamond and Related Materials, 9. pp. 663-667. ISSN 0925-9635

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Tetrahedrally bonded amorphous carbon (ta-C) and nitrogen doped (ta-C:N) films were obtained at room temperature in a filtered cathodic vacuum arc (FCVA) system incorporating an off-plane double bend (S-bend) magnetic filter. The influence of the negative bias voltage applied to substrates (from -20 to -350 V) and the nitrogen background pressure (up to 10 -3 Torr) on film properties was studied by scanning electron microscopy (SEM), electron energy loss spectroscopy (EELS), Raman spectroscopy, X-ray photoemission spectroscopy (XPS), secondary ion mass spectroscopy (SIMS) and X-ray reflectivity (XRR). The ta-C films showed sp 3 fractions between 84% and 88%, and mass densities around 3.2 g/cm 3 in the wide range of bias voltage studied. In contrast, the compressive stress showed a maximum value of 11 GPa for bias voltages around -90 V, whereas for lower and higher bias voltages the stress decreased to 6 GPa. As for the ta-C:N films grown at bias voltages below -200 V and with N contents up to 7%, it has been found that the N atoms were preferentially sp 3 bonded to the carbon network with a reduction in stress below 8 GPa. Further increase in bias voltage or N content increased the sp 2 fraction, leading to a reduction in film density to 2.7 g/cm 3 .

Item Type: Article
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:22
Last Modified: 14 Dec 2017 02:21