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Microwave power effects on the properties of phosphorus-doped SiC:H films prepared using ECR-CVD

Yoon, SF and Ji, R and Ahn, J and Milne, WI (1997) Microwave power effects on the properties of phosphorus-doped SiC:H films prepared using ECR-CVD. Diamond and Related Materials, 6. pp. 48-54. ISSN 0925-9635

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:31
Last Modified: 06 Oct 2014 01:24
DOI:

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