CUED Publications database

Microwave power effects on the properties of phosphorus-doped SiC:H films prepared using ECR-CVD

Yoon, SF and Ji, R and Ahn, J and Milne, WI (1997) Microwave power effects on the properties of phosphorus-doped SiC:H films prepared using ECR-CVD. Diamond and Related Materials, 6. pp. 48-54. ISSN 0925-9635

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Abstract

There has been a growing interest in hydrogenated silicon carbide films (SiC:H) prepared using the electron cyclotron resonance-chemical vapour deposition (ECR-CVD) technique. Using the ECR-CVD technique, SiC:H films have been prepared from a mixture of methane, silane and hydrogen, with phosphine as the doping gas. The effects of changes in the microwave power (from 150 to 900 W) on the film properties were investigated in a series of phosphorus-doped SiC:H films. In particular, the changes in the deposition rate, optical bandgap, activation energy and conductivity were investigated in conjunction with results from Raman scattering and Fourier transform infra-red (FTIR) analysis. It was found that increase in the microwave power has the effect of enhancing the formation of the silicon microcrystalline phase in the amorphous matrix of the SiC:H films. This occurs in correspondence to a rapid increase in the conductivity and a reduction in the activation energy, both of which exhibit small variations in samples deposited at microwave powers exceeding 500 W. Analysis of IR absorption results suggests that hydrogen is bonded to silicon in the Si-H stretching mode and to carbon in the sp3 CHn rocking/wagging and bending mode in films deposited at higher microwave powers.

Item Type: Article
Uncontrolled Keywords: ECR-CVD Microwave power effects Phosphorus-doped SiC:H films
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:31
Last Modified: 27 Nov 2014 19:22
DOI: