Yoon, SF and Ji, R and Ahn, J and Milne, WI (1997) Microwave power effects on the properties of phosphorus-doped SiC:H films prepared using ECR-CVD. Diamond and Related Materials, 6. pp. 48-54. ISSN 0925-9635
Full text not available from this repository.| Item Type: | Article |
|---|---|
| Subjects: | UNSPECIFIED |
| Divisions: | UNSPECIFIED |
| Depositing User: | Cron Job |
| Date Deposited: | 20 Dec 2011 12:10 |
| Last Modified: | 27 May 2013 01:18 |
| DOI: |
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