CUED Publications database

Compositional analysis of thin film amorphous semiconductors and insulators using LIMA

Smith, GJ and Eagle, DJ and Milne, WI (1985) Compositional analysis of thin film amorphous semiconductors and insulators using LIMA. Applied Surface Science, 22-23. pp. 930-936. ISSN 0169-4332

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Abstract

LIMA (Laser-induced Ion Mass Analysis) is a new technique capable of compositional analysis of thin films and surface regions. Under UHV conditions a focused laser beam evaporates and ionizes a microvolume of specimen material from which a mass spectrum is obtained. LIMA has been used to examine a range of thin film materials with applications in electronic devices. The neutral photon probe avoids charging problems, and low conductivity materials are examined without prior metallization. Analyses of insulating silicon oxides, nitrides, and oxynitrides confirm estimates of composition from infrared measurements. However, the hydrogen content of hydrogenated amorphous silicon (a-Si : H) found by LIMA shows no correlation with values given by infrared absorption analysis. Explanations are proposed and discussed. © 1985.

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Depositing User: Cron job
Date Deposited: 16 Jul 2015 13:14
Last Modified: 03 Aug 2015 02:11
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