Milne, WI and Robertson, PA (1986) PHOTOENHANCED DEPOSITION OF HYDROGENATED AMORPHOUS SILICON THIN FILMS. IEE Colloquium (Digest). ISSN 0963-3308Full text not available from this repository.
This paper will review the different U. V. lamp photo-CVD (Chemical Vapor Deposition) techniques which have been utilized for the production of highly photoconductive hydrogenated amorphous silicon (a-Si:H) thin films. Most of these require the transmission of U. V. light through a window into the reaction vessel; leading to unwanted U. V. light absorption by the window and the a-Si:H film which tends to form on its inner surface. A deposition system developed in our laboratory will also be described, which circumvents these problems by incorporating a windowless discharge lamp into the reaction vessel.
|Divisions:||Div B > Solid State Electronics and Nanoscale Science|
Div B > Photonics
|Depositing User:||Cron Job|
|Date Deposited:||02 Sep 2016 17:01|
|Last Modified:||01 Dec 2016 07:41|