Coombs, TA and Samad, I and Ruiz-Alonso, D and Tadinada, K (2005) Superconducting micro-bearings. IEEE Transactions on Applied Superconductivity, 15. pp. 2312-2315. ISSN 1051-8223Full text not available from this repository.
This paper presents research into superconducting Micro-Bearings for MEMS systems. Advanced silicon processing techniques developed for the Very Large Scale Integration (VLSI) industry have been exploited in recent years to enable the production of micro-engineered moving mechanical systems. These devices commonly known as Micro-ElectroMechanical Systems (MEMS) have many potential advantages. In many respects the effect of scaling a machine from macro-sized to micro-sized are either neutral or beneficial. However in one important respect the scaling produces a severely detrimental effect. That respect is in the tribology and the subsequent wear on the high speed rotating machines. This leads to very short device lifetimes. This paper presents results obtained from a MEMS motor supported on superconducting bearings. The bearings are self-positioning, relying on, the Meissner effect to provide a levitation force which moves the rotor into position and flux pinning to provide stability thereafter. The rotor is driven by a simple electrostatic type motor in which photo resist is used to pattern the motor poles directly onto the rotor. © 2005 IEEE.
|Uncontrolled Keywords:||Bearings MEMS Micro-machining VLSI|
|Depositing User:||Cron job|
|Date Deposited:||16 Jul 2015 14:11|
|Last Modified:||04 Oct 2015 04:07|