CUED Publications database

Laser micromachining of sputtered DLC films

Fu, YQ and Luo, JK and Flewitt, AJ and Ong, SE and Zhang, S and Milne, WI (2006) Laser micromachining of sputtered DLC films. Applied Surface Science, 252. pp. 4914-4918. ISSN 0169-4332

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Abstract

DLC films with different thicknesses (from 100 nm to 1.9 μm) were deposited using sputtering of graphite target in pure argon atmosphere without substrate heating. Film microstructures (sp2/sp3 ratio) and mechanical properties (modulus, hardness, stress) were characterized as a function of film thickness. A thin layer of aluminum about 60 nm was deposited on the DLC film surface. Laser micromachining of Al/DLC layer was performed to form microcantilever structures, which were released using a reactive ion etching system with SF6 plasma. Due to the intrinsic stress in DLC films and bimorph Al/DLC structure, the microcantilevers bent up with different curvatures. For DLC film of 100 nm thick, the cantilever even formed microtubes. The relationship between the bimorph beam bending and DLC film properties (such as stress, modulus, etc.) were discussed in details. © 2005 Elsevier B.V. All rights reserved.

Item Type: Article
Uncontrolled Keywords: DLC Laser micromachining Microcantilever
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:03
Last Modified: 22 Dec 2014 01:19
DOI: 10.1016/j.apsusc.2005.06.054