CUED Publications database

Thin film shape memory alloys for optical sensing applications

Fu, YQ and Luo, JK and Huang, WM and Flewitt, AJ and Milne, WI (2007) Thin film shape memory alloys for optical sensing applications. Journal of Physics: Conference Series, 76. ISSN 1742-6588

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Abstract

Based on shape memory effect of the sputtered thin film shape memory alloys, different types of micromirror structures were designed and fabricated for optical sensing application. Using surface micromachining, TiNi membrane mirror structure has been fabricated, which can be actuated based on intrinsic two-way shape memory effect of the free-standing TiNi film. Using bulk micromachining, TiNi/Si and TiNi/Si 3N 4microcantilever mirror structures were fabricated. © 2007 IOP Publishing Ltd.

Item Type: Article
Uncontrolled Keywords: Film Micromirror Shape memory Sputtering TiNi
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:11
Last Modified: 27 Nov 2014 19:21
DOI: 10.1088/1742-6596/76/1/012032