CUED Publications database

Smart chemical sensor application of ZnO nanowires grown on CMOS compatible SOI microheater platform

Park, J and Huh, J and Ali, SZ and Udrea, F and Gardner, JW and Kim, G-T and Maeng, S and Milne, WI (2007) Smart chemical sensor application of ZnO nanowires grown on CMOS compatible SOI microheater platform. 2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007, Technical Proceedings, 1. pp. 418-421.

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Abstract

Smart chemical sensor based on CMOS(complementary metal-oxide- semiconductor) compatible SOI(silicon on insulator) microheater platform was realized by facilitating ZnO nanowires growth on the small membrane at the relatively low temperature. Our SOI microheater platform can be operated at the very low power consumption with novel metal oxide sensing materials, like ZnO or SnO2 nanostructured materials which demand relatively high sensing temperature. In addition, our sol-gel growth method of ZnO nanowires on the SOI membrane was found to be very effective compared with ink-jetting or CVD growth techniques. These combined techniques give us the possibility of smart chemical sensor technology easily merged into the conventional semiconductor IC application. The physical properties of ZnO nanowire network grown by the solution-based method and its chemical sensing property also were reported in this paper.

Item Type: Article
Uncontrolled Keywords: CMOS compatible SOI microheater Smart chemical sensor and sol-gel growth ZnO nanowire
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:34
Last Modified: 30 Nov 2014 21:46
DOI: