CUED Publications database

Degradation evaluation of microelectromechanical thermal actuators

Luo, JK and Fu, YQ and Huang, QA and Williams, JA and Milne, WI (2008) Degradation evaluation of microelectromechanical thermal actuators. Proceedings of SPIE - The International Society for Optical Engineering, 6884. ISSN 0277-786X

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Materials Engineering
Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:01
Last Modified: 06 Oct 2014 01:24
DOI: