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Advanced thermal processing of semiconductor materials in the msec-range

Skorupa, W and Yankov, RA and Voelskow, M and Anwand, W and Panknin, D and McMahon, RA and Smith, M and Gebel, T and Rebohle, L and Fendler, R and Hentsch, W (2005) Advanced thermal processing of semiconductor materials in the msec-range. 13th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2005. pp. 53-71.

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:15
Last Modified: 10 Mar 2014 18:02
DOI:

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