CUED Publications database

Thin film shape memory alloys and microactuators

Fu, YQ and Luo, JK and Flewitt, AJ and Huang, WM and Zhang, S and Du, HJ and Milne, WI (2009) Thin film shape memory alloys and microactuators. International Journal of Computational Materials Science and Surface Engineering, 2. pp. 208-226. ISSN 1753-3465

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Abstract

For Micro-electro-mechanical System (MEMS) applications, TiNi-based thin film Shape Memory Alloys (SMAs) possess many desirable properties, such as high power density, large transformation stress and strain upon heating and cooling, superelasticity and biocompatibility. In this paper, recent development in TiNi-based thin film SMA and microactuator applications is discussed. The topics related to film deposition and characterisation is mainly focused on crystal nucleation and growth during annealing, film thickness effect, film texture, stress induced surface relief, wrinkling and trenches as well as Temperature Memory Effect (TME). The microactuator applications are mainly focused on microvalve and microcage for biological applications, micromirror for optical applications and data storage using nanoindentation method. Copyright © 2009, Inderscience Publishers.

Item Type: Article
Uncontrolled Keywords: MEMS Micro-electro-mechanical system Shape memory Thin films TiNi
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:11
Last Modified: 16 Dec 2014 19:05
DOI: 10.1504/IJCMSSE.2009.027483