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Fabrication of high-Q film bulk acoustic resonator (FBAR) filters with carbon nanotube (CNT) electrodes

Garcia-Gancedo, L and Al-Naimi, F and Flewitt, AJ and Milne, WI and Ashley, GM and Luo, JK and Zhao, XB and Lu, JR (2010) Fabrication of high-Q film bulk acoustic resonator (FBAR) filters with carbon nanotube (CNT) electrodes. In: UNSPECIFIED pp. 301-304..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 16 Jul 2015 13:14
Last Modified: 02 Sep 2015 22:02
DOI: