Ferri, M and Belsito, L and Mancarella, F and Masini, L and Roncaglia, A and Yan, J and Seshia, AA and Zalesky, J and Soga, K (2011) Fabrication and testing of a high resolution extensometer based on resonant MEMS strain sensors. In: UNSPECIFIED pp. 1056-1059..Full text not available from this repository.
A novel type of linear extensometer with exceptionally high resolution of 4 nm based on MEMS resonant strain sensors bonded on steel and operating in a vacuum package is presented. The tool is implemented by means of a steel thin bar that can be pre-stressed in tension within two fixing anchors. The extension of the bar is detected by using two vacuum-packaged resonant MEMS double- ended tuning fork (DETF) sensors bonded on the bar with epoxy glue, one of which is utilized for temperature compensation. Both sensors are driven by a closed loop self-oscillating transresistance amplifier feedback scheme implemented on a PCB (Printed Circuit Board). On the same board, a microcontroller-based frequency measurement circuit is also implemented, which is able to count the square wave fronts of the MEMS oscillator output with a resolution of 20 nsec. The system provides a frequency noise of 0.2 Hz corresponding to an extension resolution of 4 nm for the extensometer. Nearly perfect temperature compensation of the frequency output is achieved in the temperature range 20-35 C using the reference sensor. © 2011 IEEE.
|Item Type:||Conference or Workshop Item (UNSPECIFIED)|
|Uncontrolled Keywords:||Extensometer MEMS resonator strain sensor vacuum packaging|
|Divisions:||Div C > Applied Mechanics|
Div D > Geotechnical and Environmental
|Depositing User:||Cron job|
|Date Deposited:||04 Feb 2015 23:05|
|Last Modified:||05 Feb 2015 08:17|