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Deposition and characterisation of ultralow-stress ZnO thin films for application in FBAR-based gravimetric biosensors

García-Gancedo, L and Ashley, GM and Zhao, XB and Pedrós, J and Flewitt, AJ and Milne, WI and Luo, JK and Lu, JR and Ford, CJB and Zhang, D (2011) Deposition and characterisation of ultralow-stress ZnO thin films for application in FBAR-based gravimetric biosensors. International Journal of Nanomanufacturing, 7. pp. 371-382. ISSN 1746-9392

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron Job
Date Deposited: 13 Dec 2011 16:10
Last Modified: 20 May 2013 01:38
DOI:

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