CUED Publications database

Deposition and characterisation of ultralow-stress ZnO thin films for application in FBAR-based gravimetric biosensors

García-Gancedo, L and Ashley, GM and Zhao, XB and Pedrós, J and Flewitt, AJ and Milne, WI and Luo, JK and Lu, JR and Ford, CJB and Zhang, D (2011) Deposition and characterisation of ultralow-stress ZnO thin films for application in FBAR-based gravimetric biosensors. International Journal of Nanomanufacturing, 7. pp. 371-382. ISSN 1746-9392

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:05
Last Modified: 06 Oct 2014 01:24
DOI: