CUED Publications database

Optical emission studies of the plasma during high-pressure sputtering of Y-Ba-Cu-O targets

Tsaneva, VN and Donchev, TI and Popov, TK and Durrell, JH and Blamire, MG and Barber, ZH and Evetts, JE (2004) Optical emission studies of the plasma during high-pressure sputtering of Y-Ba-Cu-O targets. In: UNSPECIFIED pp. 257-260..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: optical emission spectroscopy high-pressure sputtering plasma parameters/diagnostics thin film YBCO Y-123 Y-124 FILMS SPECTROSCOPY DISCHARGE MICROWAVE
Subjects: UNSPECIFIED
Divisions: Div C > Materials Engineering
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:42
Last Modified: 15 Sep 2014 01:06
DOI: 10.1016/j.vacuum.2004.07.026