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Optical emission spectroscopy of the plasma during sputter deposition of YBCO films for microwave applications

Tsaneva, VN and Nurgaliev, TC and Donchev, TI and Vickers, ME and Durrell, JH and Purnell, A and Cohen, LF and Barber, ZH (2003) Optical emission spectroscopy of the plasma during sputter deposition of YBCO films for microwave applications. In: UNSPECIFIED pp. 2769-2772..

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Abstract

YBCO thin films are currently used in several HTS-based electronics applications. The performance of devices, which may include microwave passive components (filters, resonators), grain boundary junctions or spintronic multilayer structures, is determined by film quality, which in turn depends on the deposition technology used and growth parameters. We report on results from nonintrusive Optical Emission Spectroscopy of the plasma during YBCO thin film deposition in a high-pressure on-axis sputtering system under different conditions, including small trace gas additions to the sputtering gas. We correlate these results with the compositional and structural changes which affect the DC and microwave properties of YBCO films. Film morphology, composition, structure and in- and out-of-plane orientation were assessed; T, and microwave surface resistance measurements were made using inductive and resonator techniques. Comparison was made with films sputtered in an off-axis 2-opposing magnetron system.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: thin-films high-temperature superconductors thin films optical emission spectroscopy target sputtering microwave properties
Subjects: UNSPECIFIED
Divisions: Div C > Materials Engineering
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:43
Last Modified: 02 Jun 2014 01:16
DOI: 10.1109/Tasc.2003.812002

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