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Electron transport and effective ionization coefficients in C2F6, C2F6-Ar and C2F6-N-2 mixtures

de Urquijo, J and Castrejon-Pita, AA and Hernandez-Avila, JL and Basurto, E (2004) Electron transport and effective ionization coefficients in C2F6, C2F6-Ar and C2F6-N-2 mixtures. J PHYS D APPL PHYS, 37. pp. 1774-1779. ISSN 0022-3727

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Item Type: Article
Uncontrolled Keywords: ATTACHMENT PERFLUOROALKANES N-C4F10 C3F8 CF4
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:30
Last Modified: 16 Dec 2014 19:06
DOI: 10.1088/0022-3727/37/13/008