CUED Publications database

Focused ion beams and silicon-on-insulator - a novel approach to MEMS

Daniel, JH and Moore, DF and Walker, JF (1998) Focused ion beams and silicon-on-insulator - a novel approach to MEMS. In: 4th ESSM and 2nd MIMR Conference, 1998-7-6 to 1998-7-7, Harrogate, UK pp. 585-591..

Full text not available from this repository.
Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: theme="Materials Selection"
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 20:38
Last Modified: 27 Jul 2017 05:52
DOI: