CUED Publications database

A microaccelerometer structure with "tapping-mode" readout - fabriction in silicon-on-insulator using a focused ion beam process

Daniel, JH and Moore, DF (1999) A microaccelerometer structure with "tapping-mode" readout - fabriction in silicon-on-insulator using a focused ion beam process. Sensors and Actuators A: Physical, 73. pp. 201-209. ISSN 0924-4247

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Item Type: Article
Uncontrolled Keywords: theme="Computational Design"
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 20:42
Last Modified: 27 Jul 2017 05:51
DOI: