CUED Publications database

Focused ion beams in microsystem fabrication

Daniel, JH and Moore, DF and Walker, JF and Whitney, JT (1997) Focused ion beams in microsystem fabrication. Microelectronic Engineering. An International Journal of Semiconductor Manufacturing Technology including Nanoelectronic Engineering, 35. pp. 431-434. ISSN 0167-9317

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Item Type: Article
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 20:37
Last Modified: 23 Nov 2017 04:07