CUED Publications database

Contamination issues during atomic hydrogen surfactant mediated Si MBE

Lambert, AD and McGregor, BM and Morris, RJH and Parry, CP and Chu, DP and Cooke, GA and Phillips, PJ and Whall, TE and Parker, EHC (1999) Contamination issues during atomic hydrogen surfactant mediated Si MBE. SEMICOND SCI TECH, 14. L1-L4. ISSN 0268-1242

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Item Type: Article
Uncontrolled Keywords: EPITAXIAL-GROWTH SEGREGATION LAYERS PLASMA
Subjects: UNSPECIFIED
Divisions: Div B > Photonics
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 02 Sep 2016 17:00
Last Modified: 25 Sep 2016 00:53
DOI: