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Characterization of the noise in secondary ion mass spectrometry depth profiles

Chu, DP and Dowsett, MG and Cooke, GA (1996) Characterization of the noise in secondary ion mass spectrometry depth profiles. J APPL PHYS, 80. pp. 7104-7107. ISSN 0021-8979

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Item Type: Article
Uncontrolled Keywords: IMPURITY LAYERS SEMICONDUCTORS
Subjects: UNSPECIFIED
Divisions: Div B > Photonics
Depositing User: Cron Job
Date Deposited: 10 Nov 2011 10:10
Last Modified: 11 Mar 2013 01:49
DOI:

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