CUED Publications database

Characterization of the noise in secondary ion mass spectrometry depth profiles

Chu, DP and Dowsett, MG and Cooke, GA (1996) Characterization of the noise in secondary ion mass spectrometry depth profiles. J APPL PHYS, 80. pp. 7104-7107. ISSN 0021-8979

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Item Type: Article
Uncontrolled Keywords: IMPURITY LAYERS SEMICONDUCTORS
Subjects: UNSPECIFIED
Divisions: Div B > Photonics
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 15 Dec 2015 13:21
Last Modified: 09 Feb 2016 22:03
DOI: