Luo, JK and Lin, M and Fu, YQ and Wang, L and Flewitt, AJ and Spearing, SM and Fleck, NA and Milne, WI (2006) MEMS based digital variable capacitors with a high-k dielectric insulator. In: UNSPECIFIED pp. 139-146..
Full text not available from this repository.
| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
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| Uncontrolled Keywords: | MEMS digital variable capacitor high-k dielectric charge injection RF MEMS EVOLUTION ACTUATOR |
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| Subjects: | UNSPECIFIED |
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| Divisions: | Div C > Materials Engineering |
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| Depositing User: | Cron Job |
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| Date Deposited: | 20 Dec 2011 12:10 |
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| Last Modified: | 20 May 2013 02:10 |
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| DOI: | 10.1016/j.sna.2006.04.025 |
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