CUED Publications database

MEMS based digital variable capacitors with a high-k dielectric insulator

Luo, JK and Lin, M and Fu, YQ and Wang, L and Flewitt, AJ and Spearing, SM and Fleck, NA and Milne, WI (2006) MEMS based digital variable capacitors with a high-k dielectric insulator. In: UNSPECIFIED pp. 139-146..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: MEMS digital variable capacitor high-k dielectric charge injection RF MEMS EVOLUTION ACTUATOR
Subjects: UNSPECIFIED
Divisions: Div C > Materials Engineering
Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:27
Last Modified: 20 Apr 2015 11:45
DOI: 10.1016/j.sna.2006.04.025