CUED Publications database

Deposition of carbon nitride films by ionised magnetron sputtering

Kusano, Y and Christou, C and Barber, ZH and Evetts, JE and Hutchings, IM (1999) Deposition of carbon nitride films by ionised magnetron sputtering. THIN SOLID FILMS, 356. pp. 117-121. ISSN 0040-6090

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Item Type: Article
Uncontrolled Keywords: carbon nitride ionised magnetron sputtering Fourier transform infrared spectroscopy optical emission spectroscopy THIN-FILMS ARC SPECTROSCOPY
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 16 Jul 2015 13:09
Last Modified: 02 Sep 2015 22:28
DOI: