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AlN-based BAW resonators with CNT electrodes for gravimetric biosensing

García-Gancedo, L and Zhu, Z and Iborra, E and Clement, M and Olivares, J and Flewitt, AJ and Milne, WI and Ashley, GM and Luo, JK and Zhao, XB and Lu, JR (2011) AlN-based BAW resonators with CNT electrodes for gravimetric biosensing. Sensors and Actuators, B: Chemical, 160. pp. 1386-1393. ISSN 0925-4005

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Solidly mounted resonators (SMRs) with a top carbon nanotubes (CNTs) surface coating that doubles as an electrode and as a sensing layer have been fabricated. The influence of the CNTs on the frequency response of the resonators was studied by direct comparison to identical devices with a top metallic electrode. It was found that the CNTs introduced significantly less mass load on the resonators and these devices exhibited a greater quality factor, Q (>2000, compared to ∼1000 for devices with metal electrodes), which increases the gravimetric sensitivity of the devices by allowing the tracking of smaller frequency shifts. Protein solutions with different concentrations were loaded on the top of the resonators and their responses to mass-load from physically adsorbed coatings were investigated. Results show that resonators using CNTs as the top electrode exhibited a higher frequency change for a given load (∼0.25 MHz cm2ng-1) compared to that of a metal thin film electrode (∼0.14 MHz cm2ng-1), due to the lower mass of the CNT electrodes and their higher active surface area compared to that of a thin film metal electrode. It is therefore concluded that the use of CNT electrodes on resonators for their use as gravimetric biosensors is a significant improvement over metallic electrodes that are normally employed. © 2011 Elsevier B.V. All rights reserved.

Item Type: Article
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 18:59
Last Modified: 21 Jun 2018 02:20