CUED Publications database

Surface preparation of 1-3 piezocomposite material for microfabrication of high frequency transducer arrays

Bernassau, AL and McKay, S and Hutson, D and Demore, CEM and Garcia-Gancedo, L and Batton, TW and McAneny, JJ and Cochran, C (2007) Surface preparation of 1-3 piezocomposite material for microfabrication of high frequency transducer arrays. In: UNSPECIFIED pp. 96-99..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: 1-3 piezocomposite high frequency array lapping polishing microfabrication photolithography FABRICATION
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:09
Last Modified: 05 Feb 2015 00:13
DOI: